HIGH BRIGHTNESS LED

Highlights

  • AOI and PSS metrology in one compact platform
  • Fully automated single button operation
  • Integrated multi-cassette sorting enables wafer binning



PSS METROLOGY

Leading PSS manufacturers around the world adopt the Zeta metrology solution because it provides the most stable and repeatable measurements, and is the most user friendly and cost effective.

PSS TYPES AND SIZES

Cone PSS

Dome PSS

Flat Top PSS



PSS type and size continues to evolve so Zeta continues to

develop its technology to keep up with the industry changes.


DEFECT INSPECTION (AOI)

  • Defect Review

    Close up view of a defect found by AOI

 
  • 3D Profile

    High resolution 3D image of the defect

 
  • Analysis

    Detailed 3D data for root cause analysis of the defect

 

DEFECT TYPE EXAMPLES

Tear-Out

Contamination

Missing PSS

Epi Defect

Stain


WAFER SORTING



LED sapphire wafers need to be sorted by PSS measurement and defect inspection results. The Zeta-360 can measure the PSS, inspect for defects, manage the collected data, and sort the wafers into the appropriate bins without the users having to handle the wafers or the data in between those steps. This greatly simplify, and improve, your manufacturing process flow.