Transparent Thin Film Measurement - All Zeta systems can be ordered with a thin film spectro-photometer that measures the reflectance characteristics of the surface. Advanced curve fitting and iterative solving algorithms in the Zeta 3D software match the reflectance curve with calculated values from known n and k values to determine the thickness of various layers.
The system can handle multi-film stacks and can also reverse calculate a material's n value if its thickness is known.
Our film thickness measurement system comes with over 200 thin film material libraries that include materials such as Silicon Nitride, Silicon Dioxide, Aluminum Oxide, Gallium Nitride and many more.
Zeta Interference Contrast (ZiC) / Nomarski Imaging - For low contrast or very small features, Zeta systems can be factory-fitted with Nomarski prisms that allow the system to resolve nanometer-scale features.
In addition, ZiC imaging can also image transparent samples where different surfaces have very little contrast between them and are difficult for other systems to easily discern.
For those that may need ZiC in the future, but have a limited immediate budget, we can offer "Nomarski-ready" systems. This option includes basic components that require factory installation, but not the ZiC system to save cost. The remainder of the ZiC hardware can then be ordered later and installed in the field.
Multi-FOV Image Stitching - To obtain a wide field of view with high magnification, the Zeta 3D software has an Image Stitching option that allows a user to join multiple images into a single large 3D image.
Our system software can support composite stitched images as large as 8 FOV by 7 FOV giving an effective total FOV of 2008um x 1323um at 100x magnification using a 0.35x lens coupler.
Sample Stages - Different industries and research disciplines have different types of sample types and sizes.
The Zeta-20 has a breadboard base with a standard 1" tapped hole grid to permit the mounting of various stages to accomodate a wide range of sample positioning and illumination needs.