Non-contact profiling for Nano-Fabrication
Micro-Fluidics/Micro-channelsBiotechnology applications such as gene sequencing make use of micron-scale fluid channels that route and filter chemical compounds. These structures generally cover large areas and employ extreme features with high aspect ratios. The physical nature of these microscopic structures makes them very difficult to analyze properly using stylus profilers or atomic force microscopes, but are easily handled by Zeta optical profilers.
The Biotechnology industry shift from glass to plastic substrates was facilitated through the use of Zeta optical profilers which could clearly measure widths and depths of microchannels and adjust fabrication processes.
The additional capability of Zeta optical profilers to image and measure channels encapsulated under glass has made them very useful in measurement applications throughout the manufacturing cycle. Our patented ZDot technology allows for multi-surface profiling of the top and bottom glass surfaces as well as the channel underneath.
MEMSNano-devices and micro-machines have high-aspect-ratio features that can be quickly measured and easily imaged using Zeta ZDot technology.
The non-contact, non-destructive measurement process of Zeta optical profilers is also a big benefit to R&D where samples can be one-of-a-kind.