Metrology

Adding more dimensions to microscopy …
Images

What is the true color and shape of the sample?

A well defined true color and 3D image is the first step in solving problems and making an informed decision about your test surfaces.

Dimensions

How wide & tall?

Accurate dimensions for parts that you can only see under a microscope.  Get lateral dimensions, step heights and wall angles, all from a single scan.

Metrology

How is the surface?

Calculating 2D and 3D roughness parameters from the millions of data points provides accurate  topography information as opposed to data from single line traces or much smaller fields of views in other tools.

Film Thickness

What else is on the surface?

Single or multi layers film thickness  can be measured with the spectrometer option.  Now the user can simultaneously investigate the surface topography AND the films that make up the surface.