The Zeta-20^TM is a fully-integrated surface measurement system that provides advanced 3D imaging and metrology features in a flexible, cost-effective package. Zeta's proprietary Z-Dot^TM technology enables rapid imaging of PSS, Solar Cells, Fluid Microchannels, and other surfaces that more costly systems cannot easily handle. Since there is no sample contact and very little system maintenance, the Zeta-20 delivers unparalleled performance with minimal cost of ownership.

Typical system configuration includes:

• 5x, 10x, 20x, 50x, 100x objectives
• 1/3" CCD camera; 0.5x coupling lens
• 30mm travel Auto Z Stage
• 100mm x 100mm travel manual XY stage
• Computer with 3GB RAM, 320GB HD, 22" Monitor, Zeta 3D Software

3D surface visualization:
Tilt, Rotation, Zoom, Filtering
Feature volume calculation

2D surface analysis:
Feature size, diameter, area
Pattern pitch, standard deviation
Areal roughness
Box height (areal avg step height)

Profilometry
Step height
Roughness parameters
Multiple cross-sections
Averaging measurement cursors
Point-to-point measurement markers
Slope & waviness compensation