The Zeta-200^TM advanced surface measurement system provides automated 3D imaging and metrology capabilities in a flexible, cost-effective package. Zeta Instruments’ proprietary focus map technology enables rapid, true-color imaging and quantitative analysis of surfaces for off-line product inspection. The Zeta 200 automatically gathers data on step height, feature volume, dimensions and roughness on multiple measurement sites to give you the data you need to monitor and optimize your manufacturing processes.

Typical system configuration includes:

• 5x, 10x, 20x, 50x, 100x objectives
• 1/3" CCD camera; 0.5x coupling lens
• 30mm travel Auto Z Stage
• 200mm x 200mm travel Auto XY Stage
• Computer with 3GB RAM, 320GB HD, 22" Monitor, Zeta 3D Software

3D surface visualization:
Tilt, Rotation, Zoom, Filtering
Feature volume calculation

2D surface analysis:
Feature size, diameter, area
Pattern pitch, standard deviation
Areal roughness
Box height (areal avg step height)

Profilometry
Step height & Roughness
Multiple cross-sections
Averaging measurement cursors
Slope & waviness compensation
Wafer Die Grid enabled sequence option
Automated data and image export for production SPC