EFEM FOUP Option

EFEM Module

EFEM MODULE

Equipment Front End Module for 200/300mm wafers




CUSTOMER TESTIMONIAL


PRODUCT FEATURES

EFEM Module

Our EFEM module is available on both our Metrology and Defect Inspection products




EFEM Module

Dual Arm Robot

Designed to automatically handle both 200 and 300mm wafers without any change in hardware configuration


2.5D Interconnect Application

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Other Products

SYSTEM WITH MANUAL SAMPLE LOAD

ZETA-20

True Color 3D Optical Profiler

ZETA-300

Precision Surface Metrology

ZETA-500

3D Optical Profiler for 300mm Wafers

ZETA-600

3D Optical Profiler for Large Samples

ZetaScan Series

Defect Inspection for glass wafers, rough film on wafers, disk substrates/media.


CASSETTE TO CASSETTE LOAD

Wafer Handler

Wafer Handler & Sorter

ZETA-388

Optical Profiler for PSS and AOI

ZETA-580

Automated 300mm Metrology