TRUE COLOR 3D OPTICAL PROFILER

True Color 3D Non-contact Optical Profiler Zeta-20

ZETA-20

True Color 3D Non-contact Optical Profiler with Multi Mode Optics Technology



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CUSTOMER TESTIMONIAL


PRODUCT FEATURES

True Color 3D Non-contact Optical Profiler Zeta-20




Transmitted Illumination

  • This feature is available on systems with glass stage top
  • High brightness LED control can be part of the Advanced Recipe setup, enabling a combination of several illumination sources during a scan


Side Illumination

  • Darkfield illumination
  • Light position and angle are adjustable
  • High brightness LED control can be part of the Advanced Recipe setup, enabling a combination of several illumination sources during a scan

Breadboard Base

  • Solid 12x12 inch base with an array of threaded holes for flexible configuration
  • You can add your own accesories

Modular Z-Tower

  • Rigid, one-piece, vertical tower for stability
  • Multiple mounting points to accommodate various sample thickness and stage options

ZETA-20 CM

(Disk Chamfer Measurements)

  • The Zeta-20 CM is dedicated to measuring the magnetic disk edge geometry and inspect for contamination or edge damages
  • This package include an software application package developed specifically for disk edge metrology and inspection

3D Profiler and Metrology Application

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ZETA-20 Swivel Head

  • Enables imaging of large and heavy samples that cannot be rotated easily
  • Swivel head moved along precision grooves from the vertical to the horizontal position
  • Head can be repeatedly positioned at any required angle using the angular scale markings on the support plate

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SYSTEM WITH MANUAL SAMPLE LOAD

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Precision Surface Metrology

ZETA-500

3D Optical Profiler for 300mm Wafers

ZETA-600

3D Optical Profiler for Large Samples

ZetaScan Series

Defect Inspection for glass wafers, rough film on wafers, disk substrates/media.

CASSETTE TO CASSETTE LOAD

Wafer Handler

Wafer Handler & Sorter

EFEM Module

EFEM for 200/300mm wafers

ZETA-388

Optical Profiler for PSS and AOI

ZETA-580

Automated 300mm Metrology